bottom antireflective coatings Topics by
Jun 13 2018· The effects of the bottom antireflective coating with different baked temperatures and thicknesses on nanoscale patterns NASA Astrophysics Data System ADS Zheng Jie Li Ling Chen Weidong The bottom antireflective coating BARC material can enhance the resolution of the nanopatterns structures in laser interference lithography process In this study WIDEB ARC